| Image Output Pixels | 5 Mega-pixel (Max) |
| Image Size | 2040 (H)×1530 (V) |
| Frame Rate | 50fps (Max) |
| HDR | Real-time Display / 25fps (Max) |
| Lens | Motorized / Manual Lens |
| High Precision Inclination Stand ST-AS / High Precision Stand ST-G | High Precision Inclination Stand ST-AS / High Precision Stand ST-G |
| XY Stage | Motorized / Manual Stage |
| 2D Measurement | Yes |
| Multi-focus, 3D Structure Data | Yes |
| 3D Measurement | Option |
| Image Tiling | Option |
| Contamination Analysis Option | Option |
| Monitor Resolution | 4K Resolution 3840 x 2160 pixels |
| Lamp Type | High Intensity LED |
| Life Time | 30,000 hours |
| Color Temerature | 5700K |
| Supply Voltage | AC100V~240V 50/60Hz |
| Consumption | 200W |
| Main Unit | 2.5kg |
| Camera Unit | 1kg |
| Main Unit | W130mm×H 243.6mm×D 275mm |